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LIN ZHIZHOU;LI ZENGPU;WU JIANHUA;WANG GE Institute of Atomic Energy, P. O. Box 275. Beijing. A FREEMAN-TYPE ION SOURCE FOR MEDIUM-CURRENT ION IMPLANTATOR[J]. Atomic Energy Science and Technology, 1987, 21(1): 82-82. DOI: 10.7538/yzk.1987.21.01.0082
Citation: LIN ZHIZHOU;LI ZENGPU;WU JIANHUA;WANG GE Institute of Atomic Energy, P. O. Box 275. Beijing. A FREEMAN-TYPE ION SOURCE FOR MEDIUM-CURRENT ION IMPLANTATOR[J]. Atomic Energy Science and Technology, 1987, 21(1): 82-82. DOI: 10.7538/yzk.1987.21.01.0082
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A FREEMAN-TYPE ION SOURCE FOR MEDIUM-CURRENT ION IMPLANTATOR

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  • The Principle and construction of the Frceman ion source are brieflydescribed. The main experimental results are as follows: the average beamcurrent is 2--3 mA for ~(40)Ar~+ and 500--700 μA for ~(11)B~+. The maximum beamcurrent is 4.8 mA and 800 μA for ~(49)Ar~+ and ~(11)B~+ respectively. Divergent angleof transverse and longitudial is±2.1°. and 8.9°respectively. The gas consumptionis 1.5×10~5ml·Pa/min. The filament life is about 20 hours (~(11)B 500 μA). Theworking temperature ranges from 250 to 800℃.
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