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XU GUOJI China Institute of Atomic Energy, P. O. Box 275, Beijing. DETERMINATION AND CONTROL OF TARGET THICKNESSES WITH QUARTZ CRYSTAL THICKNESS MONITOR[J]. Atomic Energy Science and Technology, 1990, 24(5): 78-78. DOI: 10.7538/yzk.1990.24.05.0078
Citation: XU GUOJI China Institute of Atomic Energy, P. O. Box 275, Beijing. DETERMINATION AND CONTROL OF TARGET THICKNESSES WITH QUARTZ CRYSTAL THICKNESS MONITOR[J]. Atomic Energy Science and Technology, 1990, 24(5): 78-78. DOI: 10.7538/yzk.1990.24.05.0078
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DETERMINATION AND CONTROL OF TARGET THICKNESSES WITH QUARTZ CRYSTAL THICKNESS MONITOR

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  • The measurement principle of model IL 100 thickness and rate monitor aredescribed. The method of converting linear thickness in nm units into mass thick-ness in μg/cm~2 units is mentioned. The effect of crucible temperature upon thick-ness determination is discussed. The gas amount absorbed by deposition foils isgiven.
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