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PROGRESS OF AN END EXTRACTION SPUTTERING PIG ION SOURCE WITH PERMANENT MAGNET[J]. Atomic Energy Science and Technology, 1996, 30(3): 198-198. DOI: 10.7538/yzk.1996.30.03.0198
Citation: PROGRESS OF AN END EXTRACTION SPUTTERING PIG ION SOURCE WITH PERMANENT MAGNET[J]. Atomic Energy Science and Technology, 1996, 30(3): 198-198. DOI: 10.7538/yzk.1996.30.03.0198
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PROGRESS OF AN END EXTRACTION SPUTTERING PIG ION SOURCE WITH PERMANENT MAGNET

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