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DEPTH PROFILING OF IMPLANTED HELIUM BY 16O ELASTIC RECOIL DETECTION[J]. Atomic Energy Science and Technology, 1998, 32(1): 75-79. DOI: 10.7538/yzk.1998.32.01.0075
Citation: DEPTH PROFILING OF IMPLANTED HELIUM BY 16O ELASTIC RECOIL DETECTION[J]. Atomic Energy Science and Technology, 1998, 32(1): 75-79. DOI: 10.7538/yzk.1998.32.01.0075
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DEPTH PROFILING OF IMPLANTED HELIUM BY 16O ELASTIC RECOIL DETECTION

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