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Wu Weidong Luo Jiangshan Zhang Zhanwen Huang Yong (Institute of Nuclear Physics and Chemistry,China Academy of Engineering Physics,Chengdu,610003). PREPARATION OF C x H 1- x FILM[J]. Atomic Energy Science and Technology, 1999, 33(4): 319-319. DOI: 10.7538/yzk.1999.33.04.0319
Citation: Wu Weidong Luo Jiangshan Zhang Zhanwen Huang Yong (Institute of Nuclear Physics and Chemistry,China Academy of Engineering Physics,Chengdu,610003). PREPARATION OF C x H 1- x FILM[J]. Atomic Energy Science and Technology, 1999, 33(4): 319-319. DOI: 10.7538/yzk.1999.33.04.0319
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  • The C x H 1- x film are prepared using low pressure plasma CVD with trans 2 butene.The Fourier transform infrared spectroscopy (FT IR) and XPS spectra of C x H 1- x film prepared at various flow ratio between H 2 and trans 2 butene are studied.The growth mechanism of C x H 1- x film is briefly discussed.The production rate of sp 3 carbon and sp 2 carbon is related with the deposition condition.
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