Shen Jun Zhang Qinyuan Yang Tianhe Deng Zhongsheng Zhou Bin Wang Jue Chen Lingyan (Pohl Institute of Solid State Physics, Tongji University, Shanghai,200092). PREPARATION OF ZrO 2 COATING WITH HIGH REFRACTIVE INDEX BY HYDRO THERMAL PROCESS[J]. Atomic Energy Science and Technology, 1999, 33(4): 328-328. DOI: 10.7538/yzk.1999.33.04.0328
Citation: Shen Jun Zhang Qinyuan Yang Tianhe Deng Zhongsheng Zhou Bin Wang Jue Chen Lingyan (Pohl Institute of Solid State Physics, Tongji University, Shanghai,200092). PREPARATION OF ZrO 2 COATING WITH HIGH REFRACTIVE INDEX BY HYDRO THERMAL PROCESS[J]. Atomic Energy Science and Technology, 1999, 33(4): 328-328. DOI: 10.7538/yzk.1999.33.04.0328
  • A new method to prepare ZrO 2 coating with high refractive index from inorganic precursor (ZrOCl 2·8H 2O) is reported. ZrO 2 sol with particle size from several to tens nanometer is prepared by hydro thermal process. The water in the sol is then replaced with methoxyethanol by distillation. The ZrO 2 coatings are prepared with spin coating method. The surface micro morphology of the film are detected by atom force microscope and α step apparatus. The infrared transmittance spectra of the films are also obtained. The film thickness and refractive index are measured by ellipsometer, and their relationship with the temperature of thermal treatment is investigated. The influences of the incorporating organic binder PVP(polyvinyl pyrrolidone)on the refractive index and the scratch resistance of the film are also discussed briefly.
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