Wang Zhanshan Gao Honggang Ma Yueying Lü Junxia Cao Jianlin (Changchun Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, 130022). SOFT X RAY MULTILAYERS[J]. Atomic Energy Science and Technology, 1999, 33(4): 337-337. DOI: 10.7538/yzk.1999.33.04.0337
Citation: Wang Zhanshan Gao Honggang Ma Yueying Lü Junxia Cao Jianlin (Changchun Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, 130022). SOFT X RAY MULTILAYERS[J]. Atomic Energy Science and Technology, 1999, 33(4): 337-337. DOI: 10.7538/yzk.1999.33.04.0337
  • The multilayer with working wavelength at soft X ray range is a key component which can construct a variety of optical systems, such as telescopes, microscopes, projection lithographic systems, spectrographs etc. The studies of soft X ray multilayers in Changchun Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, are briefly described in the paper.
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