Lü Junxia 1 Ma Yueying 1 Pei Shu 1 Shen Changbin 2 Cao Jianlin 1 Chen Xingdan 1 (1 Changchun Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, 130022) (2 Dalian Railway Institute, 116028). FABRICATION AND CHARACTERIZATION OF Mo/B 4C MULTILAYER AT WAVELENGTH OF 8 0 nm FOR X RAY LASER[J]. Atomic Energy Science and Technology, 1999, 33(4): 343-343. DOI: 10.7538/yzk.1999.33.04.0343
Citation: Lü Junxia 1 Ma Yueying 1 Pei Shu 1 Shen Changbin 2 Cao Jianlin 1 Chen Xingdan 1 (1 Changchun Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, 130022) (2 Dalian Railway Institute, 116028). FABRICATION AND CHARACTERIZATION OF Mo/B 4C MULTILAYER AT WAVELENGTH OF 8 0 nm FOR X RAY LASER[J]. Atomic Energy Science and Technology, 1999, 33(4): 343-343. DOI: 10.7538/yzk.1999.33.04.0343
  • The Mo/B 4C multilayer at wavelength of 8.0 nm is fabricated by magnetron sputtering. The microstructure of multilayer are tested using X ray diffraction and TEM,and the results show that Mo/B 4C multilayer have high structural quality and thermal stability.
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