Study on the Fabrication Technology of the Microspot Targets

The microspot target is one of the most important targets in the inertial confinement fusion(ICF) experiment, its fabrication technology is complicated. The target consists of a hydrocarbon(CH) film with a sharply defined spot(microspot) in the center seeded with another material. The target is fabricated using a three step procedure consisting of depositing the hydrocarbon film, defining the microspot, and depositing a seeded spot through a mask. The paper describes the production of CH film by the way of hot wire chemical vapor deposition, and focuses on the fabrication technology of the microspot target.