Study on Figure Transfer Process and the Preparation of Surface Perturbation Target

SUN Qi, ZHOU Bin, HUANG Yao dong, SHEN Jun, WU Guang ming, TANG Wei xing, YANG Fan, WANG Jue (Pohl Institute of Solid State Physics, Tongji University, Shanghai 200092, China)

doi:10.7538/yzk.2002.36.z1.0327

SUN Qi, ZHOU Bin, HUANG Yao dong, SHEN Jun, WU Guang ming, TANG Wei xing, YANG Fan, WANG Jue (Pohl Institute of Solid State Physics, Tongji University, Shanghai 200092, China). Study on Figure Transfer Process and the Preparation of Surface Perturbation Target[J]. Atomic Energy Science and Technology, 2002, 36(Z1): 327-327. DOI: 10.7538/yzk.2002.36.z1.0327

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Study on Figure Transfer Process and the Preparation of Surface Perturbation Target

SUN Qi, ZHOU Bin, HUANG Yao dong, SHEN Jun, WU Guang ming, TANG Wei xing, YANG Fan, WANG Jue (Pohl Institute of Solid State Physics, Tongji University, Shanghai 200092, China)

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According to the request of the resolved experiments of inertial confinement fusion(ICF), sinusoidal surface perturbation figures with the wavelength from 20 to 100 μm and amplitude from 0.2 to 3.5 μm on polystyrene film are prepared. Through laser interference and a nickle electroplate process, perturbation figures on photoresist and nickle plate mold are obtained. The figures are transferred on polystyrene foils by a spin coating process. Figure transfer process is studied, and the transfer precision and surface roughness of the sinusoidal perturbation is measured by α step apparatus and atom force microscope.

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Study on Figure Transfer Process and the Preparation of Surface Perturbation Target

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