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HUANG Yong, WU Wei dong, WEI Sheng, LUO Jiang shan, ZHANG Ji cheng, ZHANG Zhan wen (Research Center of Laser Fusion, China Academy of Engineering Physics, P. O. Box 919 987, Mianyang 621900, China). Study on the Coating of Thick C_xH_(1-x) Film on the Polymer Micro0spherical Shell[J]. Atomic Energy Science and Technology, 2002, 36(Z1): 343-343. DOI: 10.7538/yzk.2002.36.z1.0343
Citation: HUANG Yong, WU Wei dong, WEI Sheng, LUO Jiang shan, ZHANG Ji cheng, ZHANG Zhan wen (Research Center of Laser Fusion, China Academy of Engineering Physics, P. O. Box 919 987, Mianyang 621900, China). Study on the Coating of Thick C_xH_(1-x) Film on the Polymer Micro0spherical Shell[J]. Atomic Energy Science and Technology, 2002, 36(Z1): 343-343. DOI: 10.7538/yzk.2002.36.z1.0343
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  • The technical conditions of coating CH film on the polymer micro spherical shell surface are studied by low pressure plasma chemical vapor deposition(LPP CVD). The results show that the styrene is better than trans 2 butene as working gas, and the deposition rate is about 3～4 μm/h for styrene, 1 μm/h for the trans 2 butene. Combined with the bouncing pan method, the coating of C x H 1- x film with the thickness of 50～80 μm and the mean smoothness of 50 nm on the polymer micro spherial shell surface is carried out.
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