Measurement Technology of the Surface Characteristic of the Inertial Confinement Fusion Targets With Scanning Probe Microscope

SUN Tao <sup>1,2</sup>, GAO Dang zhong 1, TANG Yong jian 1, FU Yi bei 1, DONG Shen 2 (1 Research Center of Laser Fusion, China Academy of Engineering Physics, Mianyang 621900, China; 2 Research Institute of Precision Engineering, Harbin Institute of Technology, Harbin 150001, China)

doi:10.7538/yzk.2002.36.z1.0361

Atomic Energy Science and Technology > 2002 > 36(Z1): 361-361. > DOI: 10.7538/yzk.2002.36.z1.0361

SUN Tao ^1,2, GAO Dang zhong 1, TANG Yong jian 1, FU Yi bei 1, DONG Shen 2 (1 Research Center of Laser Fusion, China Academy of Engineering Physics, Mianyang 621900, China; 2 Research Institute of Precision Engineering, Harbin Institute of Technology, Harbin 150001, China). Measurement Technology of the Surface Characteristic of the Inertial Confinement Fusion Targets With Scanning Probe Microscope[J]. Atomic Energy Science and Technology, 2002, 36(Z1): 361-361. DOI: 10.7538/yzk.2002.36.z1.0361

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Measurement Technology of the Surface Characteristic of the Inertial Confinement Fusion Targets With Scanning Probe Microscope

SUN Tao ^1,2, GAO Dang zhong 1, TANG Yong jian 1, FU Yi bei 1, DONG Shen 2 (1 Research Center of Laser Fusion, China Academy of Engineering Physics, Mianyang 621900, China; 2 Research Institute of Precision Engineering, Harbin Institute of Technology, Harbin 150001, China)

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Received Date: August 24, 2001

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The paper presents a measurement system which uses reformed atomic force microscope(AFM) as sensor, combined with precision rotating air bearing and 3 D micro positioning device. The precision measurement on shape error of the inertial confinement fusion(ICF) target's circle is carried out. The results show that this method can be applied in the technology of ICF target making and can provide the accurate data of target's surface profile for experiments of ICF target practice.
- inertial confinement fusion targets,
- atomic force microscope,
- precision measurement

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Measurement Technology of the Surface Characteristic of the Inertial Confinement Fusion Targets With Scanning Probe Microscope

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