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YAO Ze-en1, CHEN Shang-wen1, DONG Ming-yi1, JIA Wen-bao1, GUAN Yong-chao2(1.Department of Modern Physics, Lanzhou University, Lanzhou 730000, China; 2.China Academy of Engineering Physics, Mianyang 621900, China). Sputtering Effect on Life-time of Titanium Tritide Target[J]. Atomic Energy Science and Technology, 2003, 37(1): 25-25. DOI: 10.7538/yzk.2003.37.01.0025
Citation: YAO Ze-en1, CHEN Shang-wen1, DONG Ming-yi1, JIA Wen-bao1, GUAN Yong-chao2(1.Department of Modern Physics, Lanzhou University, Lanzhou 730000, China; 2.China Academy of Engineering Physics, Mianyang 621900, China). Sputtering Effect on Life-time of Titanium Tritide Target[J]. Atomic Energy Science and Technology, 2003, 37(1): 25-25. DOI: 10.7538/yzk.2003.37.01.0025
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  • Ion sputtering yields on TTi target are numerically calculated with TRIM program. The data of sputtering yields demonstrate that O+, N+, C+ and D+2 would bring about the decrease of lifetime of TTi target. In addition, the incident angle of ion beam should be less than 45° for decreasing the effect of ion sputtering.
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