XIANG Yi-huai, SHAN Yu-sheng, GONG Kun, TANG Xiu-zhang,GAO Zhi-xing, DAI Hui, WANG Nai-yan(China Institute of Atomic Energy, P. O. Box 275-7, Beijing 102413, China). Experimental Investigations of Beam Smooth Technique for High Power KrF Laser System[J]. Atomic Energy Science and Technology, 2003, 37(2): 101-101. DOI: 10.7538/yzk.2003.37.02.0101
Citation: XIANG Yi-huai, SHAN Yu-sheng, GONG Kun, TANG Xiu-zhang,GAO Zhi-xing, DAI Hui, WANG Nai-yan(China Institute of Atomic Energy, P. O. Box 275-7, Beijing 102413, China). Experimental Investigations of Beam Smooth Technique for High Power KrF Laser System[J]. Atomic Energy Science and Technology, 2003, 37(2): 101-101. DOI: 10.7538/yzk.2003.37.02.0101
  • The technique called echelonfree induced spatial incoherence is adapted for producing smooth target beam profiles with high power KrF excimer lasers. The result of bandwidth Δλ=4×10-10 m, optical coherence time tc=0.5 ps and inhomogeneous coefficient σ≤12% is obtained.
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