Production Study of Negative Ion Beam on the Intensive Sputter Source

WANG Xiao-fei;BAO Yi-wen;QIN Jiu-chang China Institute o f Atomic Energy,P.O.Box 275-62, Beijing 102413,China

doi:10.7538/yzk.2004.38.03.0239

WANG Xiao-fei;BAO Yi-wen;QIN Jiu-chang China Institute o f Atomic Energy,P.O.Box 275-62, Beijing 102413,China. Production Study of Negative Ion Beam on the Intensive Sputter Source[J]. Atomic Energy Science and Technology, 2004, 38(3): 239-239. DOI: 10.7538/yzk.2004.38.03.0239

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Production Study of Negative Ion Beam on the Intensive Sputter Source

WANG Xiao-fei;BAO Yi-wen;QIN Jiu-chang China Institute o f Atomic Energy,P.O.Box 275-62, Beijing 102413,China

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Production study of negative ion beam from 8 kinds of element was performedwith 200 Model intensive sputter source. The formation of negative ions from theseelements is difficult dut to electron affinity of these negative ions is near to or less thanzero. Different target materials and auxiliary gases were tried out in the experiment inorder to increase the beam intensity.

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Production Study of Negative Ion Beam on the Intensive Sputter Source

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