Accuracy and Sensitivity of Film Thickness Measurement by Using α-Particle Energy Loss Method

XU Jia-yun<sup>1</sup>,BAI Li-xin<sup>1</sup>,WU Wei-dong<sup>2</sup>,WU Li-ping<sup>1</sup>,ZHOU Hou-quan<sup>1</sup> (1.College of Physical Science and Technology,Sichuan University,Chengdu 610064,China;2.China Academy of Engineering Physics,P.O.Box 919-986,Mianyang 621900,China)

doi:10.7538/yzk.2005.39.06.0495

XU Jia-yun1,BAI Li-xin1,WU Wei-dong2,WU Li-ping1,ZHOU Hou-quan1 (1.College of Physical Science and Technology,Sichuan University,Chengdu 610064,China;2.China Academy of Engineering Physics,P.O.Box 919-986,Mianyang 621900,China). Accuracy and Sensitivity of Film Thickness Measurement by Using α-Particle Energy Loss Method[J]. Atomic Energy Science and Technology, 2005, 39(6): 495-495. DOI: 10.7538/yzk.2005.39.06.0495

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Accuracy and Sensitivity of Film Thickness Measurement by Using α-Particle Energy Loss Method

XU Jia-yun¹,BAI Li-xin¹,WU Wei-dong²,WU Li-ping¹,ZHOU Hou-quan¹ (1.College of Physical Science and Technology,Sichuan University,Chengdu 610064,China;2.China Academy of Engineering Physics,P.O.Box 919-986,Mianyang 621900,China)

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The film that its mass thickness was measured by α-particle energy loss(method) was regarded as constitute of many layers.Each layer thickness was calculated.The total film thickness was obtained by summing thickness of every layer.It is shown that this dividing layer computing method can increase the measurement accuracy by 30% for α-particles from ~(241)Am.It is also seen that the sensitivity of thickness measurement with α-particle can be improved by lowering appropriately the energy of α-particle.

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Accuracy and Sensitivity of Film Thickness Measurement by Using α-Particle Energy Loss Method

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