ZHENG Hua1, LIU Shi1, YU Hong-bo1, ZHU Yue-jin1, WANG Long-bao1, SHI Li-qun2, LIU Chao-zhuo2 (1. Institute of Metal Research, Chinese Academy of Sciences, Shenyang 110016, China; 2. Institute of Modern Physics, Fudan University, Shanghai 200433, China). Preparation of Ti Alloy Films Containing He by Magnetron Sputtering Method and Thermodesorption Research for He in the Films[J]. Atomic Energy Science and Technology, 2005, 39(S1): 88-88. DOI: 10.7538/yzk.2005.39.S1.0088
Citation: ZHENG Hua1, LIU Shi1, YU Hong-bo1, ZHU Yue-jin1, WANG Long-bao1, SHI Li-qun2, LIU Chao-zhuo2 (1. Institute of Metal Research, Chinese Academy of Sciences, Shenyang 110016, China; 2. Institute of Modern Physics, Fudan University, Shanghai 200433, China). Preparation of Ti Alloy Films Containing He by Magnetron Sputtering Method and Thermodesorption Research for He in the Films[J]. Atomic Energy Science and Technology, 2005, 39(S1): 88-88. DOI: 10.7538/yzk.2005.39.S1.0088
  • High concentration helium, up to 0.19 (He-M ratio), was introduced into Ti films by magnetron sputtering method in a He/Ar complex atmosphere. The introduced helium distributes homogeneously in the films and mainly forms small helium bubbles. Helium thermodesorption experiments were carried out, and the results show that the thermodesorption properties of the introduced 4He are similar to those of radiogenic 3He in titanium tritides. Titanium alloy films containing helium were also prepared by this way and a comparison of thermodesorption properties between them and TiHe films was made.
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