Study on Re-location Technique of Micrometer-Size Particles

Three or more micrometer-size location marks were prepared on a carbon disk with 25 mm in diameter by vacuum-deposition of metallic thin-film patterns or pasting metallic standard TEM(transmission electron microscopy) finder grids, and μm-size particles were precisely re-located in SEM/SEM, SIMS/SIMS and SEM/SIMS. The re-location deviation is about 10 μm in SEM/SEM，about 15 μm in SEM/SIMS and in SIMS/SIMS. The method of pasting marks with matrix numeration is easier to apply, and is low cost and more compliant.