Measurement of Deuterium and Tritium Concentrationin Titanium Film

The elastic recoil detection (ERD) method was used to measure the concentration of D and T in Ti film. The Ti film with the thickness to be less than 100 nm was deposited on the smooth surface of quartz (SiO₂) substrate by means of magnetism sputter method, and covered a nickel layer with the thickness less than 10 nm in order to protect it from oxidizing and enhance the hydrogen charging. Oxygen ion beam of 6.0 MeV was selected as incident ion, and the ERD spectra were detected at the angle of 30°, then the cross-sections for O to D and T are Rutherford cross section under this experiment condition. The D and T concentrations in two samples were measured and the areal density was obtained by means of ERD method. Measurement results show that the measuring errors of D and T concentrations are less than 7%.