Fabrication and Properties of Polyimide Film for Gas-Filled Target

Precursor of polyamic acid was synthesized by 3, 3′, 4, 4′-biphenyltetracarboxylic dianhydride and 1, 4-diaminobenzene, and the corresponding ultrathin film was obtained by pulling process and thermal imidization. Then the obtained film and target were characterized by Fourier transfer infrared spectrometer (FT-IR), white light interference and X-ray fluorescence spectrometry. The film average roughness is 4.44 nm and root mean square roughness is 5.34 nm. Gas-filled targets made of thin film can afford 0.1 MPa pressure without leaking.