YANG Zhi-lin, HE Zhi-bing, LU Tie-cheng, SONG Zhi-min, YAN Jian-cheng. Effect of Parameters on Infrared Characteristic of Glow Discharge Polymer Coating for Laser Fusion Targets[J]. Atomic Energy Science and Technology, 2010, 44(8): 941-947. DOI: 10.7538/yzk.2010.44.08.0941
Citation: YANG Zhi-lin, HE Zhi-bing, LU Tie-cheng, SONG Zhi-min, YAN Jian-cheng. Effect of Parameters on Infrared Characteristic of Glow Discharge Polymer Coating for Laser Fusion Targets[J]. Atomic Energy Science and Technology, 2010, 44(8): 941-947. DOI: 10.7538/yzk.2010.44.08.0941

Effect of Parameters on Infrared Characteristic of Glow Discharge Polymer Coating for Laser Fusion Targets

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  • Received Date: December 31, 1899
  • Revised Date: December 31, 1899
  • The glow discharge polymer (GDP) coatings with the thickness from 1 to 2.5 μm were deposited at KBr crystal substrate with different parameters. Infrared characteristic and H/C ratio of GDP coatings were characterized by Fourier transform infrared absorption spectroscopy and element analysis, respectively. The effects of parameters on the ratio of SP3(CHx) and SP2(CHx) were investigated. Based on the infared results, the influence of parameters on discharge efficiency of gas was discussed. The interaction between the active segments and the surface was analyzed in the deposition process. With pressure decreasing, the proportion of the SP3(CH3) and H element will decrease, while the proportion of the SP2(CH2) and C element will increase. Increasing the radio frequency power or the ratio of T2B and H2 can get the same result.
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