Effects of Parameters on Structure and Mechanical Properties of Glow Discharge Polymer Films

The glow discharge polymer (GDP) films were fabricated by plasma polymerization technology at various parameters. The chemical structure of GDP films was characterized by Fourier transform infrared （FT-IR） spectrum. The hardness and modulus of GDP films were measured by nanoindentation. It is found that when work pressure and T₂B/H₂ flow ratio gradually decrease, SP³（CH₃）group decreases, while SP²（CH₂） and SP³（CH_1,2） group increase in the GDP films. The hardness and modulus of GDP films increase with decreasing pressure and T₂B/H₂ flow ratio. The hardness and modulus of GDP films are mainly influenced by such factors as SP³（CH₃） group, branched chain, double bond content and degree of cross-linking of carbon network in GDP films.