Preparation and Measurement of Optical Constants and Thickness for Uranium Dioxide Thin Films by Reflectance Spectroscopy

Uranium dioxide thin films were prepared by magnetron sputtering method. The films were analyzed and characterized by SEM, XPS and XRD. The reflectances of the films between 400 and 1 200 nm wavelength were measured by reflectance spectroscopy. By fitting the reflectance, the value of refractive index n and extinction coefficient k between 450 and 950 nm wavelength and the films thickness were obtained, the n is in the range of 2.1-2.65, k is nearly 0.51, and the film thickness is 637 nm.