Simulation on Thermal Effect of Target Irradiated by Pulsed Ion Beams

The thermal response of a film-substrate irradiated by pulsed ion beam is analyzed. In the case of relatively lower ion energy, the irradiating of ion beam could be equivalent to a heat flow conducting into the surface of the film. By using the finite element code, the thermal conduction of titanium films irradiated by pulsed ion beams with an energy of 600 keV, a current of 12 mA, and different beam sizes were simulated. The clear patterns of the thermal conduction were obtained.