Measurement of Thickness of Foils Based on Conjugated Confocal Micro-Displacement Sensors

The measurement of the thickness of foils is crucial to the studies on the equation of state (EOS) based on laser driven shock waves. The new method by means of conjugated confocal micro-displacement sensors was studied. An instrument was set up, and some warped foils were measured with it. The results indicate that the curve of specimen surface is avoided, and the precision is identical to the interfrometer.