Fabrication of Micro-column Array Filled With CH for ICF Target

The target with micro-column array embedded in CH is a kind of target which is important to research ps/fs laser absorbing efficiency and plasma generating and developing when laser irradiated it. A way to fabricate the target was implemented. The electronic beam-etching, X-ray etching and microplating were used to fabricate micro-meter array and space was filled with CH in it. The SEM, AFM and white-light interferometer were used to characterize the sample. The result shows that the micro-column ratio of high and width is 4, the verticality is close to 90° and the space is 2×2 μm, and the thickness of CH is 4 μm.