AN Kun, WANG Guang-fu, YU Ling-da, WU Bing-bing. Improvement of Ionizer and Power Supply of 860 A Sputtering Negative Ion Source[J]. Atomic Energy Science and Technology, 2014, 48(6): 1123-1126. DOI: 10.7538/yzk.2014.48.06.1123
Citation: AN Kun, WANG Guang-fu, YU Ling-da, WU Bing-bing. Improvement of Ionizer and Power Supply of 860 A Sputtering Negative Ion Source[J]. Atomic Energy Science and Technology, 2014, 48(6): 1123-1126. DOI: 10.7538/yzk.2014.48.06.1123

Improvement of Ionizer and Power Supply of 860 A Sputtering Negative Ion Source

  • A transmission surface type ionizer was developed with a 2.5 mm stainless steel sheath core heating cable, and the ion source power supply was also improved. A continuous adjustable DC switching power supply was employed instead of the original AC power supply as the ionizer power supply, and a 0-20 kV DC power supply at the ground potential as the power of the immersion lens replaced the original 10 kV DC power supply suspended in -20 kV. The variation of the beam intensity of H- in the front Faraday cup of the GIC4117 2×1.7 MV tandetron with the ionizer heating current was also shown.
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