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XIE Jun, ZHANG Zhao-rui, HUANG Yan-hua, JIANG Bai-bin, ZHANG Hai-jun, LI Guo, SONG Cheng-wei, WEI Sheng, GAO Sha-sha. Electrical Discharge Machining Technology of Semiconductor Boron Cylindrical Micro-target[J]. Atomic Energy Science and Technology, 2017, 51(10): 1915-1920. DOI: 10.7538/yzk.2017.51.10.1915
Citation: XIE Jun, ZHANG Zhao-rui, HUANG Yan-hua, JIANG Bai-bin, ZHANG Hai-jun, LI Guo, SONG Cheng-wei, WEI Sheng, GAO Sha-sha. Electrical Discharge Machining Technology of Semiconductor Boron Cylindrical Micro-target[J]. Atomic Energy Science and Technology, 2017, 51(10): 1915-1920. DOI: 10.7538/yzk.2017.51.10.1915
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Electrical Discharge Machining Technology of Semiconductor Boron Cylindrical Micro-target

  • Research Center of Laser Fusion, China Academy of Engineering Physics, P. O. Box 919-987, Mianyang 621900, China

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  • In the study of inertial confinement fusion, the boron cylindrical micro-target can be used as hohlraum filling material. In this paper, the boron cylindrical micro target was machined by electrical discharge machining (EDM) milling technology, and the dielectric is material which has higher carbon content and the electrode material is tungsten steel which has good electrical conductivity. The boron column size was characterized by OLYMPUS STM6 measuring microscope. The results show that dimension precision of diameter is less than 10 μm. The morphology of the sample was analyzed by scanning electron microscopy (SEM). The results show that the surface morphology of boron is unchanged. The surface conductive layer of sample was characterized by energy dispersive spectrum (EDS) analysis and X-ray energy spectrum (XPS) analysis. The results show that during the EDM milling process, because the dielectric breaks into free carbon and the electrode material is fused and deposited on the surface of the workpiece, the auxiliary conductive layer is formed. Through machining processing of the auxiliary conductive layer, the instantaneous high temperature causes the boron to melt and gasify, thus machining processing of the semiconductor boron is realized.
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  • [1]
    杨细平，邱祖民. 硼及其硼化物的应用研究进展[J]. 化工技术与开发，2008，37（6）：22-24.YANG Xiping, QIU Zumin. Application and research development of boron and boride[J]. Technology & Development of Chemtiacl Industry, 2008, 37（6）: 22-24（in Chinese）.
    [2]
    赵晶，李富，刘志宏，等. 高温气冷堆控制棒硼燃耗特性分析[J]. 原子能科学技术，2011，45（12）：1484-1488.ZHAO Jing, LI Fu, LIU Zhihong, et al. Analysis of boron depletion in HTR control rod[J]. Atomic Energy Science and Technology, 2011, 45(12): 1484-1488（in Chinese）.
    [3]
    LIU T K, LUH S P, PERNG H C. Effect of boron particle surface coating on combustion of solid p ropellants for ducted rockets[J]. Propellant, Explosive, Pyrotechnics, 1991, 16(4): 156-166.
    [4]
    PRICE E W, BRADLEY H H, Jr, DEHORITY G L, et al. Theory of ignition of solid propellant[J]. AIAA Journal, 1966, 4(7): 1153-1181.
    [5]
    NAGAMATSU J, NAKAGAWA N. Superconductivity at 39 K in magnesium dibofide[J]. Nature, 2001, 410: 63-64.
    [6]
    BARTLEY C, VALENTE T, TULUI M. Plasma spray deposition and high temperature characterization of ZrB2 SiC protective coatings[J]. Surface and Coatings Technology, 2002, 155（2）: 260-273.
    [7]
    许国基，魏永钦. 硼靶制备技术的研究[J]. 原子能科学技术，1999，33(4)：357-359.XU Guoji, WEI Yongqing. The preparation of boron targets[J]. Atomic Energy Science and Technology, 1999, 33(4): 357-359（in Chinese）.
    [8]
    JAQUEZ J S, NIKROO A, WILKENS H L. Fabrication and characterization of hohlraums with a Co-mixed gold-boron layer[J]. Fusion Science & Technology, 2009, 55(3): 313-317.
    [9]
    ALFBRD C S. Sputter deposited beryllium fuel capsules for MF：UCRHD-129463[R]. California: Lawrence Livermore National Laboratory, 1998.
    [10]
    HOARTY D, WILLI O, WATT R, et al. Observation of ionization fronts in low density foam target[J]. Physics of Plasmas, 1999, 6(5): 2171-2177.
    [11]
    谢军，邢丕峰，易泰民，等. 真空热压技术制备EOS实验用LiH薄膜[J]. 稀有金属材料与工程，2013，42（2）：424-427.XIE Jun, XING Pifeng, YI Taimin, et al. Fabrication LiH film used in EOS experiment by vacuum hot pressing technology[J]. Rare Metal Materials and Engineering, 2013, 42(2)：424-427（in Chinese）.
    [12]
    余家珊. 电火花加工理论基础[M]. 北京：国防工业出版社，2011：182-186.
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