Study on Damage Mechanism of Microwave Window in ECR Ion Source

WEI Xubo; LI Gongping; PAN Xiaodong; WU Qi; LIU Yuguo

doi:10.7538/yzk.2019.youxian.0260

Atomic Energy Science and Technology > 2020 > 54(3): 556-563. > DOI: 10.7538/yzk.2019.youxian.0260

WEI Xubo, LI Gongping, PAN Xiaodong, WU Qi, LIU Yuguo. Study on Damage Mechanism of Microwave Window in ECR Ion Source[J]. Atomic Energy Science and Technology, 2020, 54(3): 556-563. DOI: 10.7538/yzk.2019.youxian.0260

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Study on Damage Mechanism of Microwave Window in ECR Ion Source

School of Nuclear Science and Technology, Lanzhou University, Lanzhou 730000, China
Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou 730000, China

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Abstract

The microwave window of 2.45 GHz electron cyclotron resonance (ECR) ion source is a lossy component when it works on intense ion beam DC mode, resulting in limited service life. In order to study the damage mechanism of microwave window, the finite element software was used to calculate the temperature and stress distributions of Al₂O₃ ceramic microwave window under the effect of the microwave, plasma and backstreaming electrons. The calculation result shows that the maximum Von Mises stress is at the edge of the microwave window under the effect of microwave and plasma, while under the effect of the electron beam, the largest stress is at the center of the microwave window. Enhancing water-cooling performance can reduce the influence of microwave and plasma on microwave window, and increasing thickness of BN can protect the window from electron beam more effectively. The combination of these two methods is feasible and effective in practice to extend the service life of the ECR ion source.
- electron cyclotron resonance ion source,
- microwave window,
- intense ion beam,
- finite element

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