Validity Analysis of Spatial Distribution Measurement of Secondary Electron by Solving Eigenmatrix Method

In order to measure the secondary electron spatial distribution of different materials in the actual environment accurately, a new type of secondary electron emission spatial distribution measurement structure was designed. The experimental measurement principle was given, and the measured data were analyzed by solving the eigenmatrix method to obtain the required secondary electron spatial distribution. The validity of proposed measurement method by simulation calculation was verified, and the simulation result was consistent with the assumed secondary electron spatial distribution function. It indicates that the measurement method is reliable and accurate. The prototype of measurement system will be developed based on this new design.