Research and Development of 10 cm×10 cm Bulk Micromegas Detector

Bulk Micromegas detector is a new type of microstructure gas detector. A multi-channel Bulk Micromegas detector with an effective area of 10 cm×10 cm was fabricated by using photolithography. Capacitance tests were performed on each channel of the detector, showing good uniformity of the detector. The detector with an effective area of 10 cm × 10 cm was tested in the gas of Ar+10%CO₂, using ⁵⁵Fe radioactive source and digital electronics based on APV25 front-end card independently. The detector achieved good performance, obtaining a clear two-dimensional event distribution map. At present, all the processes of this detector can be made locally in China and can be mass-produced, and the yield rate is close to 100%.