Research on Decoupling Control Strategy of Parallel 6-DOF Active Vibration Control Platform

The parallel 6-DOF active vibration control platform can effectively isolate the influence of external low-frequency micro-vibration on precision equipment such as accelerator BPM and beamline station. Because of the parallel 6-DOF active vibration control platform has strong coupling characteristics, it is necessary to analyze and study the coupling characteristics of the platform. In this paper, the parallel 6-DOF active vibration control platform was constructed by piezoelectric ceramic actuator. Based on the kinematics of the platform, the dynamic model of platform was established by Newton-Euler method. The coupling characteristics of each channel of the platform were analyzed, and a general platform decoupling control strategy was designed. An experimental verification platform was built, and the experimental research on secondary channel parameter measurement and vibration was carried out. The experimental results show that the designed multi-channel decoupling control strategy is effective, and the platform has a good damping effect on low-frequency micro-vibration.