中流强注入机的弗瑞曼离子源
A FREEMAN-TYPE ION SOURCE FOR MEDIUM-CURRENT ION IMPLANTATOR
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摘要: <正> 一、引言 离子注入在半导体工业、金属材料改性的研究,特别是在大规模集成电路的研制中得到了广泛的应用。我们这台离子源是为中流强离子注入机研制的,它的设计指标是:1.气、固两用离子源,固体工作温度为250-800℃。2.分析后接收~(11)B~+≥500μA,横向张角(发散束)α≤±3°,纵向张角(会聚束)β≤±1°。3.在~(11)B~+=500μA下灯丝寿命为10小Abstract: The Principle and construction of the Frceman ion source are brieflydescribed. The main experimental results are as follows: the average beamcurrent is 2--3 mA for ~(40)Ar~+ and 500--700 μA for ~(11)B~+. The maximum beamcurrent is 4.8 mA and 800 μA for ~(49)Ar~+ and ~(11)B~+ respectively. Divergent angleof transverse and longitudial is±2.1°. and 8.9°respectively. The gas consumptionis 1.5×10~5ml·Pa/min. The filament life is about 20 hours (~(11)B 500 μA). Theworking temperature ranges from 250 to 800℃.