薄铜靶的制备及其厚度测量

PREPARATION OF THIN Cu TARGETS AND THEIR THICKNESS MEASUREMENT

摘要: <正> 一、引言联邦德国重离子研究所的物理实验需要一系列薄铜靶,其要求是:(1)厚度为2、4、8、15、30、100 μm/cm~2;(2)靶的大小为φ15 mm;(3)靶的均匀性好于 9％;(4)厚度测量精度为10％(>30 μg/cm~2的靶)和20％(<30 μg/cm~2的靶)。

Abstract: Preparation of Cu targets with thicknesses from 2 to 100μg/cm~2 by vacuumevaporation and their thickness measurement with spectrophotometer are described.The optical absorption spectrum of a 35μg/cm~2 Cu foil and a calibration curveof optical absorption VS thickness for Cu foils are measured. The characteristicof absorption spectrum for different elements is discussed.