Abstract: 30--170 keV He ions implanted into SS 316 L at doses of 10~(14)--3×10~(17)/cm~2at temperatures of 77--673 K were investigated with enhanced proton backscatte-ring, SEM, TEM and microhardness measurement. The influence of temperatureon He trapping, He bubble formation, bubble growth and coalescence, andmicrohardness was studied. The microhardness of the He irradiated layers weremeasured.