石英晶体测厚仪监控核靶厚度

DETERMINATION AND CONTROL OF TARGET THICKNESSES WITH QUARTZ CRYSTAL THICKNESS MONITOR

摘要: <正> 一、引言随着核物理研究的不断深入和高稳定性加速器及高分辩探测系统的发展,对核靶质量的要求越来越高。为获得高质量的核靶,必须在靶膜沉积过程中控制薄膜形成的条件。就蒸发膜而言,除了要有较好的蒸发源,清洁的高真空系统及一定的衬底温度外,必须对膜层厚度和蒸发速率进行精确控制。为此,国内外制薄膜工作者已研究出多种膜厚和蒸速动

Abstract: The measurement principle of model IL 100 thickness and rate monitor aredescribed. The method of converting linear thickness in nm units into mass thick-ness in μg/cm~2 units is mentioned. The effect of crucible temperature upon thick-ness determination is discussed. The gas amount absorbed by deposition foils isgiven.