高分辨网栅型Au-Si表面势垒探测器的制备和性能

FABRICATION AND CHARACTERISTIC OF HIGH RESOLUTION MESH TYPE Au-Si SURFACE BARRIER DETECTOR

摘要: 制备了对紫外光灵敏且有较高能量分辨的网栅型Au-Si表面势垒探测器,其有效面积为12.56cm~2,金网栅电极厚195×10~(-10)m。对~(241)Am 5.486 MeV α粒子在室温和低真空条件下能量分辨是55-80 keV。探讨了制备工艺并测试了性能。

Abstract: The paper describes the fabrication technique and the performance of Au--Si surface barrier detectorwhich is sensitive to ultraviolet light and has high energy resolution. The active area of the Au--Si sur-face is 12. 56 cm~2. Thickness of gold mesh electrods are 195×10~(-10)m. The energy resolution is 55--80 keV for 5. 486 MeV α particle from ~(241)Am at room temperature in low vacuum.