Abstract: The self supporting Al thin foil perturbation target with controlled microstructure was prepared by evaporation, and it was used to study the spatial non uniformity in the laser drive intensity which caused Rayleigh Taylor instability. RBS, AES, SEM and α step apparatus are adopted to measure the parameters of the target. The measurement results show that the density of Al thin foil, the thickness of aluminium oxide, the cluster size and the surface roughness of Al thin foil are 2.312 g·cm -3, 7 nm, 0.1 μm and 5.3 nm, respectively. The self supporting thin foil perturbation target prepared by evaporation can meet the requirements of inertial confinement fusion.