Ｃ_ｘＨ_(１－ｘ)薄膜制备

PREPARATION OF C x H 1- x FILM

摘要: 以反式２丁烯为工作气体，采用低压等离子体化学气相沉积法制备ＣｘＨ１－ｘ薄膜。研究了在不同的Ｈ２与反式２丁烯流量比下制备的ＣｘＨ１－ｘ薄膜的傅里叶变换红外光谱（ＦＴ ＩＲ）及ＸＰＳ谱的特性。初步探讨了ＣｘＨ１－ｘ的生长机理。膜中ｓｐ３杂化碳原子和ｓｐ２杂化碳原子的数量以及两者的比例与沉积条件有关。

Abstract: The C x H 1- x film are prepared using low pressure plasma CVD with trans 2 butene.The Fourier transform infrared spectroscopy (FT IR) and XPS spectra of C x H 1- x film prepared at various flow ratio between H 2 and trans 2 butene are studied.The growth mechanism of C x H 1- x film is briefly discussed.The production rate of sp 3 carbon and sp 2 carbon is related with the deposition condition.