软X射线多层膜技术
SOFT X RAY MULTILAYERS
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摘要: 软 X 射线多层膜技术是目前工程光学和应用光学中的一个热点。用多层膜可以组成类似于可见光波段的各种软 X 射线光学仪器,如望远镜、显微镜、投影光刻系统和光谱仪器等。文章简要介绍长春光学精密机械研究所近年来软 X 射线多层膜技术的研究概况。Abstract: The multilayer with working wavelength at soft X ray range is a key component which can construct a variety of optical systems, such as telescopes, microscopes, projection lithographic systems, spectrographs etc. The studies of soft X ray multilayers in Changchun Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, are briefly described in the paper.