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８．０ｎｍ Ｘ射线激光反射镜Ｍｏ／Ｂ-４Ｃ多层膜制备及其特性

FABRICATION AND CHARACTERIZATION OF Mo/B 4C MULTILAYER AT WAVELENGTH OF 8 0 nm FOR X RAY LASER

    摘要
  • 摘要: 用磁控溅射法制备工作波长约８.０ ｎｍ 的 Ｍｏ／ Ｂ４ Ｃ多层膜作为正入射短波长（λ＜ １０．０ ｎｍ ）软 Ｘ 射线激光反射腔的反射镜。经 Ｘ 射线衍射仪和 Ｔ Ｅ Ｍ 检测，多层膜周期结构准确，热稳定性高。

     

    Abstract: The Mo/B 4C multilayer at wavelength of 8.0 nm is fabricated by magnetron sputtering. The microstructure of multilayer are tested using X ray diffraction and TEM,and the results show that Mo/B 4C multilayer have high structural quality and thermal stability.

     

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