硼靶制备技术的研究

  • 摘要: 介绍 B靶制备技术及其质量厚度测量方法。静电振动、高压电喷和离心沉淀主要用于制备有衬 B靶,而聚焦重离子束溅射和电子轰击可用来制备自支撑 B靶和有衬 B靶。 B靶的质量厚度用分光光度法和称重法测量。

     

    Abstract: The methods of producing boron films on backings by centrifugal precipitation,electrospraying and electricity vibration are presented. Techniques for preparing self supporting B targets between 0 045 and 0 45 mg/cm 2 from isotopic boron by electron bombardment or focused ion beam sputtering are discussed. Microscope slides coated with betaine or Ni plates are used as substrates from which strong B foils with little residual stress are floated. A spectrophotometer has been used to measure the mass thickness of B targets prepared by electron bombardment.

     

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