自支撑Mg靶膜的制备
PREPARATION OF Mg SELF SUPPORTING TARGET FOIL
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摘要: 用真空蒸发法成功制备了170.0~196.1 μg/cm 2 的薄自支撑 M g 靶膜和90~95 μm 的厚自支撑 M g 靶膜。甜菜碱是制备 Mg 靶膜有效的解离剂。讨论了真空蒸发制靶过程中的主要技术难点。Abstract: Magnesium metal self supporting target foil is prepared by means of the vacuum evaporation. Betaine H 2O solution is found to be a reliable and useful stripping agent for Mg foil preparation.The key techniques in the vacuum evaporation procedure are described.