自支撑Ca靶膜的制备

  • 摘要: 用真空蒸发方法成功地制备了自支撑 Ca 靶。在充 Ar 气手套箱中剥离靶膜。基片的选择、材料的清洗、快速操作和 Ar 气保护是制靶的关键。

     

    Abstract: A metal self supporting Ca target foil is successfully prepared by the vacuum evaporation method. The stripping of the foil is completed in a glove case filled with Ar gas. The choice of substrate, cleaning of materials, quick operation and protection of Ar gas are the key to get successful target.

     

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