平行极板间等离子体RF共振特性研究

Study on Characteristics of RF Resonance of Plasma in Parallel Plate Electrode

  • 摘要: 为了探索用于AVLIS的更为有效的离子引出方法, 对等离子体的RF共振离子引出方法进行了理论研究, 用PIC方法对其进行了模拟。结果表明 :在弱磁场下可产生鞘层 等离子体振荡, 其振荡频率与理论一致 外加与振荡频率一致的交流电压后将发生共振, 其振荡幅度大幅增加, 电流加大, 共振在等离子体中产生的最大电位幅度可高于外加电压幅度几倍 与离子引出方法中传统的平行板电场相比, RF共振法使得引出的离子流加大, 离子引出时间显著缩短。若达到同样的引出时间, 共振频率的交流电压的幅度可比直流电压值小一个量级。

     

    Abstract: To explore more efficient ion extraction methods used in atomic vapor laser isotope separation (AVLIS), RF resonance method of ion extraction is studied by theory and PIC simulation. The results show that sheath plasma oscillation occurs under weak magnetic field, and its frequency conforms the theoretic result. Resonance occurs when the AC voltage with the same frequency is applied to the electrodes. Amplitude of the oscillation and the current increase, and the voltage of the maximum in the plasma can be as several times high as the amplitude of the applied voltage. Compared with parallel plate static electric field method of ion extraction, RF resonance method increases the ion flux and shortens the extraction time. To achieve the same extraction time, the amplitude of the AC voltage in the resonance frequency can be less than that of the DC voltage with one order of magnitude.

     

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