Abstract: The depth profile of deuterium in β phase Ti 32Mo 5Nb alloy, the phase structure of alloy before and after absorbing deuterium are investigated by means of enhanced proton backscattering spectrometry and X ray diffraction, respectively. The results show that, at lower temperature, the rate of alloy absorbing deuterium is markedly higher than that in pure titanium; the mean atomic ratio of deuterium to titanium is as large as 2.5, and a portion of deuterium and titanium in Ti 32Mo 5Nb alloy forms compound TiD 1.971 and remaining portion of deuterium is dissolved in the alloy.