Abstract: Nuclear interactions in the proton implantation in the energy region between 60 keV and 360 keV are studied in this work. Some low energy nuclear reaction products are observed in the implantation experiments on titanium, titanium alloy, titanium and molybdenum composition, molybdenum and stainless steel metal samples. The energies of the charged particle products are about 3.9, 5.6 and 8.4 MeV, respectively. These particles are identified as alpha particles with both coincident telescope and absorption methods. These three kinds of alpha products are from different proton sub barrier reactions. The maximum reaction rate of the reaction with 3.9 MeV alpha product have reached over 10 5 /s, while the 324 keV and 1.2 mA proton beam is implanted into a Ti 2H x target. The exciting curve of this reaction increases exponentially with the growth of proton energy in the energy region from 150 keV to 330 keV. 11 N (p,α) 12 C, 11 B(p,α) 8Be and 7 Li (p,α) 4He nuclear reactions are considered as the candidate reactions for the alpha products in the implantation experiments. A series of studies on the nuclear reactions and its effects in sample surface and crystal structure have been studied with electron microscope technology.