过滤管道磁场在改进真空弧沉积系统中的作用

  • 摘要: 在 90°磁过滤管道和MEVVA源阴极之间加 30~ 60V的正偏压可使磁过滤管道起到阴极弧放电第二阳极的作用。在此情况下, 就磁过滤管道磁场对MEVVA源阳极 阴极和磁过滤管道 阴极两个回路弧放电和磁过滤管道等离子体传输效率的影响进行了实验研究。研究结果表明 :随磁过滤磁场升高, 磁过滤管道和阴极之间的弧放电规模降低, 系统的等离子体传输效率升高, 但对MEVVA源阳极和阴极之间的弧放电规模影响不大

     

    Abstract: When the magnetic filter duct is biased positively 30~60 V relative to the cathode of the MEVVA plasma source, a cathodic vacuum arc discharge is generated between the duct and the cathode. With this modified vacuum arc deposition apparatus, the effects of the filter duct magnetic field on the cathodic arc discharge and the plasma transport are studied. It is shown that the scale of the arc discharge between the filter duct and the cathode decreases, and the efficiency of the plasma transport increases with increasing filtering magnetic filed. The duct magnetic field has no effect on the arc discharge between the anode and cathode of the MEVVA plasma source.

     

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