金属铀与铝薄膜界面的俄歇电子能谱研究
Study on the Interface Between Metal Uranium and Aluminum Film by Auger Electron Spectroscopy
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摘要: 以磁控溅射沉积方法, 采用循环氩离子轰击镀和未循环轰击镀工艺在金属铀上制备了铝薄膜。俄歇电子能谱分析结果表明 :循环氩离子轰击镀获得的铝薄膜和铀基体的界面扩散比未循环轰击镀的显著增强, 且界面发生化学反应, 生成了UAl3和Al2 O3相。Abstract: Aluminum film on uranium is prepared using magnetron sputtering with and without circulated argon ion bombardment process. Auger electron spectroscopy (AES) analysis shows there is a significant diffusion and chemical reactions take place in the interface between metal uranium and aluminum film produced with circulated argon ion bombardment process, which results in the formation of UAl 3 and Al 2O 3 phases. The interfacial role to improve the corrosion resistance of aluminum coated uranium in the atmosphere is discussed.