Abstract: The penetration depth and concentration distribution for vanadium ions with low energy implanted into the dry peanut seeds is determined by scanning electron microscope and X-ray energy dispersion spectrometer. The results show that the depth-concentration distribution is a Gaussian distribution with a long tail and the maximum penetration depth is about 13.6 μm for V + with 200 keV in cotyledon of the peanut. The experimental result of the implanted V + rangen in the peanut seed is compared with the calculating value of the TRIM95.